Australian Nick Kyrgios fell 6-4 6-3 to fourth seed Alexander Zverev as the German finally claimed victory over his opponent in their third meeting of the season.
The Canadian broke immediately after a rain delay but Mannarino hit back in the next game.
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Roger Federer stretched his match win streak to 15 as he outclassed Roberto Bautista Agut 6-4, 6-4 in the quarter-finals of the Montreal Masters on Friday. "They helped so much to really get me pumped up and get me playing my game".
In other tournament action, American Jared Donaldson lost to Diego Schwartzman 0-6 7-5 7-5, while his countryman Sam Querrey was thrashed 6-4 6-1 by Kevin Anderson of South Africa.
Unseeded Argentine Diego Schwartzman posted a unusual win over American Jared Donaldson 0-6, 7-5, 7-5 to advance to a quarterfinal meeting with Robin Haase, the 52nd-ranked Dutchman who upset seventh-seeded Grigor Dimitrov of Bulgaria 7-6 (3), 4-6, 6-1.
Federer has won all seven career matches and taken all 16 sets against the 29-year-old Bautista Agut.
"I'm looking forward to a tough match because he can serve very well and he mixes up his tactics a lot", said Federer.
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"Now that Rafa is out I know I can make big strides, especially if I was to go further than the semis here", the Swiss said.
"I wish him the best".
Bautista Agut - 16th in the ATP rankings - was broken in the first game of the second set and although the Spaniard broke straight back he came unstuck again in his next service game and Federer this time held on to his advantage.
Ferrer has now lost all of his 17 contests against Federer, who is also vying to take the world number one spot from the injured Murray.
Federer was sloppy from the outset on center court, sending routine forehands wide and providing the underdog Ferrer with early break opportunities in the Montreal encounter. "I believe it's because I was more aggressive coming to the net".
The 30-year-old Haase, ranked 52nd in the world, improved to 5-0 against 36th-ranked Schwartzman in his career.
"I didn't, but I managed to win because I kept fighting".